Bosch Rexroth

Bosch Rexroth to showcase drive and control systems for semiconductor production at SEMICON West 2013

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Bosch Rexroth  share its automation technology portfolio and expertise for semiconductor manufacturing and printed electronics at SEMICON West 2013, July 9-11 at Moscone Center in San Francisco. The drive and control company will be exhibiting in booth 1919 in the South Hall.

Rexroth exhibit several advanced drive and control systems, including its compact IndraDrive Cs control system with vibration isolation capabilities and roll-to-roll printing function blocks; the versatile CKL compact linear motion module with ironless linear motor for precise positioning and zero backlash; and its IndraDyn L ironless linear motor, which features high acceleration, ultra-precise endpoint control and no cogging forces.

In addition to a variety of product displays, the company will feature two dynamic multi-techology demonstration units to showcase its drive and control technology for wafer handling and printed electronics.

Rexroth leverages its global application experience in the semiconductor industry to develop automation solutions for processes such as wafer production, front- and back-end of line production, circuit board assembly, and printed electronics to help manufacturers keep their automation systems up-to-date and in line with the latest innovations.

The company’s product portfolio includes a wide range of drives for rotational servo and stepping motors, as well as a variety of direct drives. Ironless linear motors specially developed for the semiconductor industry come in five sizes with graded lengths and cover a broad scope of power and speed. The Rexroth IndraDyn L ironless linear motor positions small masses with superior precision and maximum synchronization.

Rexroth also provides motion control systems with an open architecture and compact drives to meet users’ control needs. The company’s universal encoder interface allows its controllers to work seamlessly with different measuring systems.

For linear motion needs, Rexroth features a comprehensive selection of linear motion modules, profiled rails, runner blocks and ball screw assemblies. Precise manufacturing with compatible accuracy and preload levels makes it possible for Rexroth to provide extensive combinations and modularity in all designs. Corrosion-resistant and cleanroom-suitable models can be used for standardization across all process steps. In addition Rexroth has developed miniature and high-precision guides ideally suitable for the semiconductor industry. Precision modules handle the highly dynamic motion of small masses in the tiniest spaces as ready-to-install linear systems. The integrated ball screw drive with a zero-clearance nut system guarantees exceptional positioning and repetitive accuracy.

The company also has a pneumatics portfolio containing an expansive range of actuators, valve terminal systems and compressed air treatment systems.

With several hundred process steps and movements in the nanometer range, semiconductor production requires utmost precision, and Rexroth’s drive and control portfolio delivers on those requirements. The company‘s global engineering and application teams provide process-specific expertise to help customers develop scalable and integrated multi-technology systems. From jerk-free slow movement to high-speed positioning, Rexroth helps semiconductor process and inspection tool manufacturers master their drive and control challenges.

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